Hitachi High-Tech Launches Dark Field Wafer Defect Inspection System DI4600 to Provide High Throughput and High-Precision Defect Detection on Patterned Wafers

Hitachi High-Tech Launches Dark Field Wafer Defect Inspection System DI4600 to Provide High Throughput and High-Precision Defect Detection on Patterned Wafers

TOKYO, Dec 6, 2023 – (JCN Newswire) – Hitachi High-Tech Corporation announced today the launch of the Hitachi Dark Field Wafer Defect Inspection System DI4600 – a new tool for inspecting particles and defects on patterned wafer in semiconductor production lines.DI4600 offers improved detection capabilities due to the addition of a dedicated server that offers significantly enhanced data processing power required for the detection of particles and defects…
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